Delta RC80
It has a gyrset system, which is a bell-shaped cover, placed over the chuck and the substrate. During the spinning cycle, the cover closes and all parts of the gyrset rotate synchronously, creating a solvent-saturated ambiance. The confined air inside the cover, turns also synchronously. The result is a resist coat evenly spread over the entire surface without spinning defects. The gyrset makes it possible to spin coat very thin layers of resist without the need of diluting the resist. The unit has also the possibility of edge bead removal as well as HMDS priming and baking.
Apparatus | Delta RC80 |
Supplier | Suss Microtech |
Function | Spincoater |
Main Purpose | Spincoating resist, edge bead removal, baking and HMDS primer |
Main Characteristics | Gyrset system Max. spinspeed with closed gyrset lid: 4000 rpm Max. spinspeed with open gyrset lid: 1000 rpm Baking time: <999 sec Hotplate temperature: atleast up to 200C Edge bead removal: approximately 2.5 mm |
Specimen | Max. 4 inch Max. substrate thickness: 2 mm |
Equipment Owner | Eugene Straver +31-618242212 |
| Brian van der Bulk (back-up) +31-6 3408 1404 |