FR-pOrtable Reflectometer
Apparatus |
| FR-pOrtable Reflectometer |
Supplier | Thetametrisis | |
Location | TU2 (P.00.400) | |
Function | Accurate & precise non-destructive characterization of transparent and semitransparent single films or stack of films at a fixed angle of incidence. | |
Main Purpose | Polarisation independent measurements to model layer thickness, refractive index, uniformity, roughness | |
Main Characteristics | Bandwidth 370..1020 +/-0,8 nm Layer thickness range 20 nm..90 µm +/- 0,05 nm | |
Facilities | Spectrometer | |
Specimen | Any size, sample thickness max 10 mm | |
Equipment Owner | L.N. Schriek
(back-up) |