Dry Etch
To find the recipe for a material X in a system Y, click on the appropiate cross point, or click on a system name for a list of all the recipes on that machine.
System Material
| Leybold Fluor RIE | GIR 300 Chlorine RIE | AMS 100 Bosch | AMS 100 Cryo | Oxford ICP 180 |
Silicon (Si) | 
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Poly silicon (Si) |
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Silicon oxide (SiO2) |
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Silicon oxide (SiO2) (alternative) |
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Silicon nitride (SiNx) |
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Silicon Germanium (Si-Ge alloy) |
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Germanium (Ge) (sputtered) |
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Aluminium (Al) |
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| Aluminium Oxide | | ||||
Titanium (Ti) (sputtered) |
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Tungsten (W) (sputtered) |
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Tungsten (W) (evaporated) |
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Tantalum (Ta) |
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Molybdene |
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PMMA (organic mask) |
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